Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

Thomas Rinder; Hendrik Rothe

doi:10.1117/12.446736

23 October 2001 Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

Thomas Rinder, Hendrik Rothe

Author Affiliations +

Proceedings Volume 4447, Surface Scattering and Diffraction for Advanced Metrology; (2001) https://doi.org/10.1117/12.446736
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A major problem of in-situ surface characterization with angle-resolved light scatter (ARS) measurements is the fast and accurate acquisition of surface parameters with respect to industrial applications. The paper deals with design considerations and applications of an ARS sensor based on a calibrated CMOS photo detector array (CPDA) and an elliptical mirror system (EMS). In the first part of the paper the basic design approach of the ARS sensor system LARISSA will be presented. In the second part of the paper the characteristics of the CPDA and of the EMS will be discussed including considerations of design problems and solutions. In the third part of the paper experimental results from ARS measurements on PSL particles on Si wafers (particle diameters 5micrometers and 10(Mu) m) by using the CPDA will be considered in comparison with simulation results. Finally, the design progress will be summarized and the applicability of the ARS sensor will be discussed with respect to industrial applications. Future design steps for other specific applications will be outlined. This paper is a continuation of a previous paper.

Citation Download Citation

Thomas Rinder and Hendrik Rothe "Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array", Proc. SPIE 4447, Surface Scattering and Diffraction for Advanced Metrology, (23 October 2001); https://doi.org/10.1117/12.446736

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available