26 November 2001 Multipoint diffraction interferometry for 3D profilometry
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We present a method of 3-D profile measurement to obtain the xyz-coordinates of complex surfaces based on multipoint diffraction interferometry. This method uses multiple sets of diffraction light sources, each of which is made of two single-mode optical fibers emitting spherical wavefronts. Fringe patterns generated by the interference of two spherical wavefronts are illuminated on the target surface, whose phases are precisely determined by using phase-shifting technique. Finally, measured phase information is directly related to the xyz-coordinates of the target surface utilizing principles of multilateration.
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Seung-Woo Kim, Seung-Woo Kim, Byoung-Chang Kim, Byoung-Chang Kim, "Multipoint diffraction interferometry for 3D profilometry", Proc. SPIE 4448, Optical Diagnostics for Fluids, Solids, and Combustion, (26 November 2001); doi: 10.1117/12.449375; https://doi.org/10.1117/12.449375

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