10 December 2001 Automated high-accuracy measuring system for specular microreflectivity
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Abstract
An automated, compact system for high-accuracy measurements of specular reflectivity at different laser wavelengths (633 nm, 822 nm) on the basis of lock-in technique and LabView has been developed. With a spatial resolution of less than 2 micrometers , a signal resolution of less than 10-4 was obtained. Micro-optical components like microlenses with angular-compensating antireflection coatings, nonuniform micro-mirror arrays, broad-stripe diode laser facets and low-numerical-aperture graded-index microlenses have been characterized by two-dimensional reflectivity mapping. Errors caused by the angular spectrum of the focused polarized probe lasers were analysed.
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Ruediger Grunwald, Ruediger Grunwald, Stefan Nerreter, Stefan Nerreter, Jens Wolfgang Tomm, Jens Wolfgang Tomm, Sandy Schwirzke-Schaaf, Sandy Schwirzke-Schaaf, Fabian Doerfel, Fabian Doerfel, } "Automated high-accuracy measuring system for specular microreflectivity", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450084; https://doi.org/10.1117/12.450084
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