Translator Disclaimer
10 December 2001 Quasi-confocal extended field surface sensing
Author Affiliations +
Abstract
A novel optoelectronic setup based on a quasi confocal, z- axis extended field, proprietary design has been developed for High Resolution Non Contact 3D Surface Metrology including roughness characterization and surface flaw detection.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph Cohen-Sabban, Jerome Gaillard-Groleas, and Pierre-Jean Crepin "Quasi-confocal extended field surface sensing", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450093
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Three-dimensional metrology for printed electronics
Proceedings of SPIE (May 01 2017)
Optimized measurement of gaps
Proceedings of SPIE (May 01 2017)
Extended-field confocal imaging for 3D surface sensing
Proceedings of SPIE (February 26 2004)
Optically sectioned imaging by oblique plane microscopy
Proceedings of SPIE (July 01 2009)

Back to Top