Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project

Hendrik Rothe; Guenther Wilkening; Dorothee Hueser

doi:10.1117/12.450097

10 December 2001 Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project

Hendrik Rothe, Guenther Wilkening, Dorothee Hueser

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Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450097
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Scanning Probe Microscopy is a powerful tool in nanometrology. SPMs are now widely used in research institutions, and even in some branches of high-tech industry. However, there is a severe drawback: these instruments provide mainly images, not measurements of micro- and nano-objects. Therefore the European Commission decided to establish a network to investigate the possibility of calibration procedures traceable to the national standards of the partners involved. This paper deals with the objectives of the network, the partners, some round robin tests, the calibration structures used and the conclusions drawn from the work of the SPMet group. Consequently, it is a summary of the deliverables for the European Commission authored by the members of the network.

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Hendrik Rothe, Guenther Wilkening, and Dorothee Hueser "Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450097

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KEYWORDS

Calibration

Scanning probe microscopy

Metrology

Scanners

Microscopes

Position sensors

Standards development

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