18 June 2001 Interferometric figure metrology: enabling in-house traceability
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Abstract
The basic goal of the Advanced Optics Metrology program in NIST's Manufacturing Engineering Laboratory is to help industry ensure that their measurement results of optical figure and wavefront are traceable. This paper underscores the importance of traceability and reviews the facilities and projects dedicated to achieving that objective.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher J. Evans, Angela D. Davies, Tony L. Schmitz, Robert E. Parks, "Interferometric figure metrology: enabling in-house traceability", Proc. SPIE 4450, Harnessing Light: Optical Science and Metrology at NIST, (18 June 2001); doi: 10.1117/12.431256; https://doi.org/10.1117/12.431256
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