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27 December 2001 High-precision 2D angle measurement using fringe analysis techniques
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Abstract
In this paper, a novel angle measurement method using the fringe analysis techniques is proposed. In this method, a 2D surface profile including a tilt is obtained by fringe analysis, and the tilt in the 2D surface profile is determined by fitting the obtained surface profile with a plane. From the fitted plane, 2D angles can be easily obtained. Simulations using the Fourier transform and phase- shift methods are performed, and the results are compared with each other. Simulations show that 2D angle measurement using the fringe analysis techniques can achieve simultaneously a wide measurement range and high precision.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zongtao Ge, Takayuki Saito, Shinichi Matsuda, and Mitsuo Takeda "High-precision 2D angle measurement using fringe analysis techniques", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453643
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