27 December 2001 Measurement of the dynamic deformation of a high-frequency scanning mirror using a Shack-Hartmann wavefront sensor
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Abstract
Scanning mirrors for micro-display systems typically require operation at frequencies over 15 kHz. These mirrors undergo large dynamic stresses and inertia related deformations. We report here on the measurement of these dynamic deformations using a commercially available Shack-Hartmann wavefront sensor with data reduction software. The measured deformations using the Shack-Hartmann wavefront sensor are shown to agree with measurements obtained using a stroboscopic interferometer. Advantages of the Shack- Hartmann wavefront sensor are discussed.
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Margaret K. Brown, Timothy J. Gong, Daniel R. Neal, James P. Roller, Selso Luanava, Hakan Urey, "Measurement of the dynamic deformation of a high-frequency scanning mirror using a Shack-Hartmann wavefront sensor", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453645; https://doi.org/10.1117/12.453645
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KEYWORDS
Mirrors

Wavefront sensors

Wavefronts

Interferometers

Finite element methods

CCD image sensors

Sensors

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