Multiple-surface phase-shifting interferometry

Leslie L. Deck

doi:10.1117/12.453640

27 December 2001 Multiple-surface phase-shifting interferometry

Leslie L. Deck

Proceedings Volume 4451, Optical Manufacturing and Testing IV; (2001) https://doi.org/10.1117/12.453640
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

I show how phase shifting interferometry can be extended to account for multiple interference effects using a Fourier based analysis technique combined with wavelength tuning and a particular four-surface interferometer geometry. The technique is demonstrated by simultaneously measuring both surface profiles, the optical thickness variation and index homogeneity of a parallel plate. In addition, unlike traditional phase shifting techniques, the linear component of the homogeneity can be measured with high precision. It is shown that a significant linear component exists in a commercially supplied flat.

Citation Download Citation

Leslie L. Deck "Multiple-surface phase-shifting interferometry", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453640

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