27 December 2001 Nanometer accurate shaping with fluid jet polishing
Author Affiliations +
Abstract
This article describes the Fluid Jet Polishing process. An overview of the theoretical dependence of various important parameters is given. We discuss some results obtained with FJP, including typical material removal rates and roughness values. Some recent experiments are described that show that it is also possible to obtain removal rates as small as one nanometer per minute for glass surfaces. Specific surface profiles are created, both with and without the use of surface protecting masks.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Silvia M. Booij, Silvia M. Booij, Hedser H. van Brug, Hedser H. van Brug, Mandeep Singh, Mandeep Singh, Joseph J. M. Braat, Joseph J. M. Braat, "Nanometer accurate shaping with fluid jet polishing", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); doi: 10.1117/12.453620; https://doi.org/10.1117/12.453620
PROCEEDINGS
11 PAGES


SHARE
RELATED CONTENT

Sapphire fabrication for precision optics
Proceedings of SPIE (November 10 1996)
Fluid jet polishing: removal process analysis
Proceedings of SPIE (September 05 1999)
Finishing Tubular Diamond Turned Optics
Proceedings of SPIE (February 12 1987)
Workpiece roughness and grindability
Proceedings of SPIE (October 31 1997)
Polishing micro-optic components for use in photonic systems
Proceedings of SPIE (October 28 2001)

Back to Top