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27 December 2001 Surface features and residual strains in AlON grinding
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Abstract
Aluminum Oxynitride (AlON) is a material of interest to the military for a variety of optical applications, including conformal optics and transparent armor. However, its high hardness and large grain size (on the order of 100-200 micrometers s) produced by current powder metallurgy processes present challenges to deterministic microgrinding. For example, typical contact areas between the tool and work surface for contour grinding are on the order of the AlON grain size. Therefore, individual grains often appear in surface relief (orange peel effect) following contour grinding. In addition, small pits, on the order of 10 micrometers diameter and up to a few microns deep have been observed throughout the grain structure after fine grinding with a 2-4 micrometers diamond tool. In this paper, an overview is given of our experience micro-grinding AlON. First, some of the features observed in fine ground AlON surfaces are described in detail. A theory, based on micro-indentation, is presented to explain the generation of the surface pits. Finally, an estimate of the residual surface stresses after grinding, using x-ray diffraction techniques to measure the strains, is presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen J. Burns, Paul D. Funkenbusch, Sheryl M. Gracewski, John C. Lambropoulos, and Jeffrey L. Ruckman "Surface features and residual strains in AlON grinding", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453616
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