Laser Thomson scattering diagnostics of nonequilibrium high-pressure plasmas as applied to excimer laser pumping and plasma display

Katsunori Muraoka; Mitsuo Maeda; K. Uchino; Y. Noguchi

doi:10.1117/12.459401

19 March 2002 Laser Thomson scattering diagnostics of nonequilibrium high-pressure plasmas as applied to excimer laser pumping and plasma display

Katsunori Muraoka, Mitsuo Maeda, K. Uchino, Y. Noguchi

Author Affiliations +

Proceedings Volume 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures; (2002) https://doi.org/10.1117/12.459401
Event: Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, 2002, Moscow, Russian Federation

Abstract

Laser Thomson scattering (LTS) has been applied to measure electron density and temperature, or more generally electron energy distribution function (eedf), of non-equilibrium high pressure plasmas used for excimer laser pumping and plasma display panel. These quantities, with very high spatial and temporal resolutions and without plasma perturbation, are not obtainable by other means.

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Katsunori Muraoka, Mitsuo Maeda, K. Uchino, and Y. Noguchi "Laser Thomson scattering diagnostics of nonequilibrium high-pressure plasmas as applied to excimer laser pumping and plasma display", Proc. SPIE 4460, Selected Research Papers on Spectroscopy of Nonequilibrium Plasma at Elevated Pressures, (19 March 2002); https://doi.org/10.1117/12.459401

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