Static spectroscopic ellipsometer based on optical frequency-domain interferometry

Kazuhiko Oka; Takayuki Kato

doi:10.1117/12.452883

9 January 2002 Static spectroscopic ellipsometer based on optical frequency-domain interferometry

Kazuhiko Oka, Takayuki Kato

Proceedings Volume 4481, Polarization Analysis and Measurement IV; (2002) https://doi.org/10.1117/12.452883
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

This paper describes a novel spectroscopic ellipsometer using no mechanical or active components for polarization modulation. A pair of fairly-thick birefringent retarders are incorporated into the ellipsometer so that the spectrally-resolved ellipsometric angles (Psi) and (Delta) can be determined at once from only the single channeled spectrum. Its effectiveness is demonstrated with SiO₂ films deposited on Si substrates.

Citation Download Citation

Kazuhiko Oka and Takayuki Kato "Static spectroscopic ellipsometer based on optical frequency-domain interferometry", Proc. SPIE 4481, Polarization Analysis and Measurement IV, (9 January 2002); https://doi.org/10.1117/12.452883

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