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9 January 2002 Static spectroscopic ellipsometer based on optical frequency-domain interferometry
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Abstract
This paper describes a novel spectroscopic ellipsometer using no mechanical or active components for polarization modulation. A pair of fairly-thick birefringent retarders are incorporated into the ellipsometer so that the spectrally-resolved ellipsometric angles (Psi) and (Delta) can be determined at once from only the single channeled spectrum. Its effectiveness is demonstrated with SiO2 films deposited on Si substrates.
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Kazuhiko Oka and Takayuki Kato "Static spectroscopic ellipsometer based on optical frequency-domain interferometry", Proc. SPIE 4481, Polarization Analysis and Measurement IV, (9 January 2002); https://doi.org/10.1117/12.452883
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