1 February 2002 Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control
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Abstract
Micromachined electrostatic membrane mirrors have been in use for several years in active and adaptive optics applications. We introduce a deformable mirror with small static aberrations and resistant to damage during electrostatic snap-down in an architecture designed so that a multi-layer dielectric coatings that can be applied before the mirror is released. We also make laboratory performance measurements and produce a closed loop control algorithm.
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David Charles Dayton, David Charles Dayton, Justin D. Mansell, Justin D. Mansell, John D. Gonglewski, John D. Gonglewski, Sergio R. Restaino, Sergio R. Restaino, } "Characterization and control of a novel micromachined membrane mirror for adaptive wavefront control", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454717; https://doi.org/10.1117/12.454717
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