Paper
1 February 2002 Compact adaptive optical compensation systems using continuous silicon deformable mirrors
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Abstract
Deformable mirrors have been fabricated using microelectromechanical system (MEMS) technology. The mirrors have been integrated into an optical test bed capable of generating static and dynamic aberrations in the beam path. It was found that the DM could be used to improve optical system resolution in the presence of static aberrations. Strehl ratio was measured for the optical system under four test conditions. A Strehl ratio of 0.81 was obtained for the case in which an introduced aberration was compensated by the DM, compared to a Strehl ratio of 0.45 for case in which the aberration was uncompensated and the DM was removed from the optical path. A parallel stochastic gradient descent approach was used for control.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Greg Reimann, Julie A. Perreault, Paul A. Bierden, and Thomas G. Bifano "Compact adaptive optical compensation systems using continuous silicon deformable mirrors", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454725
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Cited by 6 scholarly publications.
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KEYWORDS
Microelectromechanical systems

Adaptive optics

Mirrors

Silicon

Optics manufacturing

Actuators

Optical testing

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