1 February 2002 Micro-electromechanical spatial light modulators with integrated electronics
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Abstract
This paper describes design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The (mu) SLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 micrometers ) illumination. Results of a proof-of- concept study are presented along with an electromechanical model and details of the fabrication process for the (mu) SLM.
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Steven Cornelissen, Steven Cornelissen, Thomas G. Bifano, Thomas G. Bifano, Paul A. Bierden, Paul A. Bierden, } "Micro-electromechanical spatial light modulators with integrated electronics", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); doi: 10.1117/12.454712; https://doi.org/10.1117/12.454712
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