30 January 2002 Multilayer coating facility for the HEFT hard x-ray telescope
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A planar magnetron sputtering facility has been established at the Danish Space Research Institute (DSRI) for the production coating of depth graded multilayers on the thermally slumped glass segments which form the basis for the hard X-ray telescope on the HEFT balloon project. The facility is capable of coating 20-45 mirrors segments in each run. The coatings are optimized W/Si coatings. The paper describes the facility, the results of the calibration and presents data for the X-ray testing of flight mirrors.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carsten P. Jensen, Carsten P. Jensen, Finn Erland Christensen, Finn Erland Christensen, Hubert C.M. Chen, Hubert C.M. Chen, Erik B. W. Smitt, Erik B. W. Smitt, Eric Ziegler, Eric Ziegler, } "Multilayer coating facility for the HEFT hard x-ray telescope", Proc. SPIE 4496, X-Ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers, and Missions, (30 January 2002); doi: 10.1117/12.454368; https://doi.org/10.1117/12.454368


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