Paper
13 December 2001 Current and ultimate limitations of scanning x-ray nanotomography
Ian McNulty
Author Affiliations +
Abstract
X-ray nanotomography has developed into a powerful new tool for three-dimensional structural analysis. The scanning approach offers capabilities that are competitive with full- field imaging. Current and ultimate limitations of nanotomography are examined in light of recent work.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ian McNulty "Current and ultimate limitations of scanning x-ray nanotomography", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); https://doi.org/10.1117/12.450234
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
X-rays

Microscopes

Tomography

Electronics

Distortion

Error analysis

Sensors

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