Diffraction-limited microbeam with Fresnel zone plate optics in hard x-ray regions

Yoshio Suzuki; Akihisa Takeuchi; Hidekazu Takano; Takuji Ohigashi; Hisataka Takenaka

doi:10.1117/12.450224

13 December 2001 Diffraction-limited microbeam with Fresnel zone plate optics in hard x-ray regions

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Takuji Ohigashi, Hisataka Takenaka

Proceedings Volume 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II; (2001) https://doi.org/10.1117/12.450224
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

X-ray microbeam using Fresnel zone plate as a beam focusing device has been tested at an undulator beamline of Spring-8. The zone material is tantalum with thickness of 1 micrometers , and the zone structure is fabricated by using electron beam lithography technique. The outermost zone width of the zone plate is 0.25micrometers . By utilizing a fully coherent illumination, a focused spot size near to the diffraction- limit (0.3micrometers ) has been achieved at an X-ray energy of 8 keV. The measured beam profiles shows good agreement with the theoretical profile. The measured diffraction efficiency agrees well with theoretical value within an X- ray energy region from 6 keV to 10 keV. A scanning microscopy experiment has also been performed in order to evaluate the spatial resolution. Fine structures of up to 0.2micrometers are clearly observed in the measured image. The modulation transfer function derived from the measured image is 10% at 0.2micrometers line and 0.2micrometers space.

Citation Download Citation

Yoshio Suzuki, Akihisa Takeuchi, Hidekazu Takano, Takuji Ohigashi, and Hisataka Takenaka "Diffraction-limited microbeam with Fresnel zone plate optics in hard x-ray regions", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); https://doi.org/10.1117/12.450224

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