13 December 2001 Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy
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Abstract
An integrating solid state detector with segmentation has been developed that addresses the needs in scanning transmission x-ray microscopy below 1 keV photon energy. The detector is not cooled and can be operated without an entrance window which leads to a total photon detection efficiency close to 100%. The chosen segmentation with 8 independent segments is matched to the geometry of the STXM to maximize image mode flexibility. In the bright field configuration for 1 ms integration time and 520 eV x-rays the rms noise is 8 photons per integration.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Feser, Michael Feser, Chris J. Jacobsen, Chris J. Jacobsen, Pavel Rehak, Pavel Rehak, Gianluigi DiGeronimo, Gianluigi DiGeronimo, Peter Holl, Peter Holl, Lothar Strueder, Lothar Strueder, } "Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450229; https://doi.org/10.1117/12.450229
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