13 December 2001 Wide-field x-ray microscopy with Kirkpatrick-Baez optics
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Modern technology permits the fabrication of Kirkpatrick-Baez (KB) multilayer optics with performance close to the theoretical limit. We have constructed a KB field-imaging microscope which operates in the x-ray energy range 6-10 keV with a field of view of 40-150 micrometers . The optics perform at a reflectivity of 80% at the first Bragg peak. Using highly-collimated synchrotron radiation, we realize a resolution of 900 nm at 9 keV. The intensity and magnification are sufficient to perform real-time imaging with a CCD x-ray camera, with increases in field of view and resolution at this energy due to improvements in both data collection and image processing. The collimation of the incident radiation corresponds to Koehler illumination. The dynamic range of the images using a 12-bit camera allows us to extend the field of view at the Bragg reflection over several Kiessig fringes. We have adjusted the energy to take advantage of absorption at the excitation edges of elements and have performed imaging using circularly polarized radiation. We have used this instrument to demonstrate wide-field imaging in both absorption and diffraction. We present magnified images of multiple layers in a test integrated circuit in absorption and of a metal single crystal in diffraction.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Terrence Jach, Stephen M. Durbin, Alex Bakulin, David S. Bright, Cristian Stagarescu, George Srajer, Daniel Haskel, Joseph Pedulla, "Wide-field x-ray microscopy with Kirkpatrick-Baez optics", Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450220; https://doi.org/10.1117/12.450220


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