Evaluation of crystal lattice imperfections using reflection x-ray microscope

Yoshiki Kohmura; Yoshio Suzuki; Tetsuya Ishikawa; Yury Ivanivich Dudchik; Nikolai N. Kolchevsky; Fadei F. Komarov

doi:10.1117/12.448482

14 November 2001 Evaluation of crystal lattice imperfections using reflection x-ray microscope

Yoshiki Kohmura, Yoshio Suzuki, Tetsuya Ishikawa, Yury Ivanivich Dudchik, Nikolai N. Kolchevsky, Fadei F. Komarov

Proceedings Volume 4501, X-Ray Mirrors, Crystals, and Multilayers; (2001) https://doi.org/10.1117/12.448482
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

A novel experimental method is presented for evaluating the crystal lattice imperfections using a reflection X-ray microscope (RXM). An X-ray microscope using an X-ray refractive lens is constructed on the reflected beam axis of the crystal. This method has a unique advantage that the image contrast due to the integral reflectivity variation and due to the phase-contrast of the crystal surface are easily discriminated by de-focusing technique. The sample crystals chosen were silicon circular Bragg Fresnel zone places (BFZPs). The BFZPs had circular zones on Si(111) plane with two different groove depths of 3.9 micrometers and 5.9 micrometers . The validity of the de-focusing method was proved and a clear difference of the X-ray microscope images was observed for the BFZPs with different groove depth.

Citation Download Citation

Yoshiki Kohmura, Yoshio Suzuki, Tetsuya Ishikawa, Yury Ivanivich Dudchik, Nikolai N. Kolchevsky, and Fadei F. Komarov "Evaluation of crystal lattice imperfections using reflection x-ray microscope", Proc. SPIE 4501, X-Ray Mirrors, Crystals, and Multilayers, (14 November 2001); https://doi.org/10.1117/12.448482

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