Author Affiliations +
Michail Grigoriev,1 Leonid Shabelnikov,1 Vecheslav Yunkin,1 Anatoly A. Snigirev,2 Irina Snigireva,2 Marco Di Michiel,2 Serguei Kuznetsov,2 Martin Hoffmann,3 Edgar I. Voges3
1Institute of Microelectronics Technology (Russia)
2European Synchrotron Radiation Facility (France)
3Univ. of Dortmund (Germany)