6 December 2001 Debris-free soft x-ray source with gas-puff target
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Abstract
We have been developing a debris-free laser plasma light source with a gas-puff target system whose nozzle is driven by a piezoelectric crystal membrane. The gas-puff target system can utilize gases such as CO2, O2 or some gas mixture according to different experiments. Therefore, in comparison with soft X-ray source using a metal target, after continuously several-hour laser interaction with gas from the gas-puff target system, no evidences show that the light source can produce debris. The debris-free soft X-ray source is prepared for soft X-ray projection lithography research at State Key Laboratory of Applied Optics. Strong emission from CO2, O2 and Kr plasma is observed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiliang Ni, Bo Chen, Yan Gong, Jianlin Cao, Jingquan Lin, Hongyan Lee, "Debris-free soft x-ray source with gas-puff target", Proc. SPIE 4502, Advances in Laboratory-based X-Ray Sources and Optics II, (6 December 2001); doi: 10.1117/12.449859; https://doi.org/10.1117/12.449859
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KEYWORDS
Plasma

X-ray sources

Crystals

X-rays

Carbon dioxide

Oxygen

Gas lasers

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