Translator Disclaimer
6 December 2001 Debris-free soft x-ray source with gas-puff target
Author Affiliations +
We have been developing a debris-free laser plasma light source with a gas-puff target system whose nozzle is driven by a piezoelectric crystal membrane. The gas-puff target system can utilize gases such as CO2, O2 or some gas mixture according to different experiments. Therefore, in comparison with soft X-ray source using a metal target, after continuously several-hour laser interaction with gas from the gas-puff target system, no evidences show that the light source can produce debris. The debris-free soft X-ray source is prepared for soft X-ray projection lithography research at State Key Laboratory of Applied Optics. Strong emission from CO2, O2 and Kr plasma is observed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiliang Ni, Bo Chen, Yan Gong, Jianlin Cao, Jingquan Lin, and Hongyan Lee "Debris-free soft x-ray source with gas-puff target", Proc. SPIE 4502, Advances in Laboratory-based X-Ray Sources and Optics II, (6 December 2001);


X ray optics imaging of a plasma source with...
Proceedings of SPIE (November 11 1994)
Surface processing by high-power soft x-ray irradiation
Proceedings of SPIE (September 07 1994)
Femtosecond x-ray diagnostic
Proceedings of SPIE (November 14 2003)
Cryogenic target for low-debris soft x-ray generation
Proceedings of SPIE (December 17 1998)

Back to Top