Magnified hard x-ray microtomography: toward tomography with submicron resolution

Christian G. Schroer; Boris Benner; Til Florian Guenzler; Marion Kuhlmann; Bruno Lengeler; Christoph Rau; Timm Weitkamp; Anatoly A. Snigirev; Irina Snigireva

doi:10.1117/12.452858

7 January 2002 Magnified hard x-ray microtomography: toward tomography with submicron resolution

Christian G. Schroer, Boris Benner, Til Florian Guenzler, Marion Kuhlmann, Bruno Lengeler, Christoph Rau, Timm Weitkamp, Anatoly A. Snigirev, Irina Snigireva

Author Affiliations +

Proceedings Volume 4503, Developments in X-Ray Tomography III; (2002) https://doi.org/10.1117/12.452858
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Parabolic compound refractive lenses (PCRLs) are high quality imaging optics for hard x-rays that can be used as an objective lens in a new type of hard x-ray full field microscope. Using an aluminium PCRL, this new type of microscope has been shown to have a resolution of 350 nm. Further improvement of the resolution down to 50 nm can be expected using beryllium as a lens material. The large depth of field (several mm) of the microscope results in sharp projection images for samples that fit into the field of view of about 300 micrometers. This allows to combine magnified imaging with tomographic techniques. First results of magnified microtomography are shown. Contrast formation in the microscope and the consequences for tomographic reconstruction are discussed. An outlook on further developments is given.

Citation Download Citation

Christian G. Schroer, Boris Benner, Til Florian Guenzler, Marion Kuhlmann, Bruno Lengeler, Christoph Rau, Timm Weitkamp, Anatoly A. Snigirev, and Irina Snigireva "Magnified hard x-ray microtomography: toward tomography with submicron resolution", Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); https://doi.org/10.1117/12.452858

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available