7 January 2002 Magnified hard x-ray microtomography: toward tomography with submicron resolution
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Abstract
Parabolic compound refractive lenses (PCRLs) are high quality imaging optics for hard x-rays that can be used as an objective lens in a new type of hard x-ray full field microscope. Using an aluminium PCRL, this new type of microscope has been shown to have a resolution of 350 nm. Further improvement of the resolution down to 50 nm can be expected using beryllium as a lens material. The large depth of field (several mm) of the microscope results in sharp projection images for samples that fit into the field of view of about 300 micrometers. This allows to combine magnified imaging with tomographic techniques. First results of magnified microtomography are shown. Contrast formation in the microscope and the consequences for tomographic reconstruction are discussed. An outlook on further developments is given.
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Christian G. Schroer, Christian G. Schroer, Boris Benner, Boris Benner, Til Florian Guenzler, Til Florian Guenzler, Marion Kuhlmann, Marion Kuhlmann, Bruno Lengeler, Bruno Lengeler, Christoph Rau, Christoph Rau, Timm Weitkamp, Timm Weitkamp, Anatoly A. Snigirev, Anatoly A. Snigirev, Irina Snigireva, Irina Snigireva, } "Magnified hard x-ray microtomography: toward tomography with submicron resolution", Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); doi: 10.1117/12.452858; https://doi.org/10.1117/12.452858
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