14 November 2001 Fast collisional capillary discharge source for soft x-ray production and applications
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We report on a fast soft x-ray source consisting in a high temperature small diameter plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x-ray microscopy applications and also with the aim of developing a soft x-ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei V. Kukhlevsky, Jozef Kaiser, Francesco Flora, Luca Mezi, "Fast collisional capillary discharge source for soft x-ray production and applications", Proc. SPIE 4504, Applications of X Rays Generated from Lasers and Other Bright Sources II, (14 November 2001); doi: 10.1117/12.448460; https://doi.org/10.1117/12.448460


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