14 November 2001 Fast collisional capillary discharge source for soft x-ray production and applications
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Abstract
We report on a fast soft x-ray source consisting in a high temperature small diameter plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x-ray microscopy applications and also with the aim of developing a soft x-ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.
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Giuseppe Tomassetti, Libero Palladino, Antonio Ritucci, Lucia Reale, Tania Limongi, Sergei V. Kukhlevsky, Jozef Kaiser, Francesco Flora, Luca Mezi, "Fast collisional capillary discharge source for soft x-ray production and applications", Proc. SPIE 4504, Applications of X Rays Generated from Lasers and Other Bright Sources II, (14 November 2001); doi: 10.1117/12.448460; https://doi.org/10.1117/12.448460
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