20 December 2001 Current status of ASET-HIT EUV phase-shifting point diffraction interferometer
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Abstract
Extreme-ultraviolet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU undulator radiation. The wave-front error of a Schwarzchild test optics was measured. Since this is a common path PDI technique, optics pre-alignment is very important to receive enough power at the second pinhole. We carried out this pre-alignment by using the same common path PS/PDI system but by using a He-Ne laser. A temporal wave-front error attained by pre-alignment was 4.4 nm rms. We then studied band width requirement to carry out this PS/PDI in EUV. We found that the wavelength ((lambda) ) dependency of grating diffraction angle plays an important role in phase matching at the CCD camera location, although significant optical path difference exists at the edge of the fringe field. A 1 micrometers square double window experiment was carried out with (lambda) /(Delta) (lambda) is congruent to 30, and straight fringes were observed throughout the CCD field. A PDI experiment using larger pinholes compared with nominal sizes was also conducted, and various factors, which were posed onto the experimental results, were investigated.
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Yoshio Gomei, Yoshio Gomei, Katsumi Sugisaki, Katsumi Sugisaki, Yucong Zhu, Yucong Zhu, Masahito Niibe, Masahito Niibe, Takeo Watanabe, Takeo Watanabe, Hiroo Kinoshita, Hiroo Kinoshita, } "Current status of ASET-HIT EUV phase-shifting point diffraction interferometer", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450962; https://doi.org/10.1117/12.450962
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