20 December 2001 Current status of ASET-HIT EUV phase-shifting point diffraction interferometer
Author Affiliations +
Extreme-ultraviolet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU undulator radiation. The wave-front error of a Schwarzchild test optics was measured. Since this is a common path PDI technique, optics pre-alignment is very important to receive enough power at the second pinhole. We carried out this pre-alignment by using the same common path PS/PDI system but by using a He-Ne laser. A temporal wave-front error attained by pre-alignment was 4.4 nm rms. We then studied band width requirement to carry out this PS/PDI in EUV. We found that the wavelength ((lambda) ) dependency of grating diffraction angle plays an important role in phase matching at the CCD camera location, although significant optical path difference exists at the edge of the fringe field. A 1 micrometers square double window experiment was carried out with (lambda) /(Delta) (lambda) is congruent to 30, and straight fringes were observed throughout the CCD field. A PDI experiment using larger pinholes compared with nominal sizes was also conducted, and various factors, which were posed onto the experimental results, were investigated.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshio Gomei, Yoshio Gomei, Katsumi Sugisaki, Katsumi Sugisaki, Yucong Zhu, Yucong Zhu, Masahito Niibe, Masahito Niibe, Takeo Watanabe, Takeo Watanabe, Hiroo Kinoshita, Hiroo Kinoshita, } "Current status of ASET-HIT EUV phase-shifting point diffraction interferometer", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450962; https://doi.org/10.1117/12.450962

Back to Top