20 December 2001 Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE
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Abstract
SAGEM, through its REOSC product line, is participating since November 1999 to PREUVE, the French EUV initiative, and work within this program especially in the field of EUV illumination and projection optics. After a short description of the PREUVE main lines of activity, we will detail our contributions to this program and work progress. This is mainly focused on basic EUV optics fabrication technology in order to ensure the fabrication of the entire optics assembly of an EUV micro exposure tool.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roland Geyl, Jean-Francois Tanne, "Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450959; https://doi.org/10.1117/12.450959
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KEYWORDS
Mirrors

EUV optics

Extreme ultraviolet lithography

Extreme ultraviolet

Optical fabrication

Optical coatings

Polishing

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