Liquid-xenon-jet laser-plasma source for EUV lithography

Bjoern A. M. Hansson; Lars Rymell; Magnus Berglund; Oscar E. Hemberg; Emmanuelle Janin; Jalmar Thoresen; Hans M. Hertz

doi:10.1117/12.450943

20 December 2001 Liquid-xenon-jet laser-plasma source for EUV lithography

Bjoern A. M. Hansson; Lars Rymell; Magnus Berglund; Oscar E. Hemberg; Emmanuelle Janin; Jalmar Thoresen; Hans M. Hertz

Author Affiliations +

Proceedings Volume 4506, Soft X-Ray and EUV Imaging Systems II; (2001) https://doi.org/10.1117/12.450943
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The liquid-xenon-jet laser-plasma source is one of the extreme-ultraviolet (EUV) source technologies under development for EUV lithography. This paper discuss the basic, demanding, requirements of a source for EUV lithography including high in-band EUV power, absence of mirror contamination and high stability. It is further discussed how the liquid-xenon-jet can meet these requirements, and specifically how the ability to operate the plasma far from any mechanical details such as the nozzle will facilitate high power operation with low resulting mirror degradation. Furthermore, a new laser-to-EUV conversion efficiency result of 0.55%/(2%BW 2pisr) at lambda=13.45 nm is presented together with a detailed description of the method for calibrated EUV-power measurement.

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Bjoern A. M. Hansson, Bjoern A. M. Hansson, Lars Rymell, Lars Rymell, Magnus Berglund, Magnus Berglund, Oscar E. Hemberg, Oscar E. Hemberg, Emmanuelle Janin, Emmanuelle Janin, Jalmar Thoresen, Jalmar Thoresen, Hans M. Hertz, Hans M. Hertz, } "Liquid-xenon-jet laser-plasma source for EUV lithography", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450943; https://doi.org/10.1117/12.450943

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