8 August 2001 Microscopic study of the structure of the SnO2 thin films obtained by the RGTO technique
Author Affiliations +
Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435943
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland
The results on the use of technology of rheotaxial growth and thermal oxidation to p0repare sensory layer of stannic oxide are present in this study. Sensor properties of the SnO2 layers greatly depend on a stage of tin layer rheotaxial growth. Observations of tin layer surface made after the process of rheotaxial growth and the SnO2 surface on the oxidation stage performed by means of a scanning electron microscope permitted drawing of many substantial conclusions regarding technology of production. The worked out technology made it possible to form sensor structures, which were next measured. This study provides a fragment of a wide research project over preparation and characterization of thin sensory layers made from stannic oxide and accomplished at the Institute of Physics and Institute of Electronics, Silesian Technical University.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jerzy Uljanow, Jerzy Uljanow, Krzysztof Waczynski, Krzysztof Waczynski, Adam Broja, Adam Broja, Teresa Karczewska-Buczek, Teresa Karczewska-Buczek, } "Microscopic study of the structure of the SnO2 thin films obtained by the RGTO technique", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); doi: 10.1117/12.435943; https://doi.org/10.1117/12.435943


Ceramic materials and nanostructures for chemical sensing
Proceedings of SPIE (November 05 2005)
Chemical gas sensors on silicon
Proceedings of SPIE (September 14 1995)
Pulsed laser deposition of metal oxide films
Proceedings of SPIE (September 13 1998)

Back to Top