Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films

Eugene G. Bortchagovsky; O. M. Getsko

doi:10.1117/12.435962

10 August 2001 Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films

Eugene G. Bortchagovsky, O. M. Getsko

Author Affiliations +

Proceedings Volume 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light; (2001) https://doi.org/10.1117/12.435962
Event: Lightmetry, 2000, Pultusk, Poland

Abstract

This talk is devoted to the analysis of different ellipsometric methods for their ability to get separately thickness and refractive index of thin films. Such analysis is necessary for unambiguous determination of all thin film parameters, not only its 'optical thickness.' Analysis and comparison of different approaches for solving of this problem is made both on the base of the theoretical consideration of methods background and on the calculation of correlation matrix for parameters of interest.

Citation Download Citation

Eugene G. Bortchagovsky and O. M. Getsko "Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films", Proc. SPIE 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light, (10 August 2001); https://doi.org/10.1117/12.435962

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