Optical constants and film thickness calculation based on the ratio of envelopes of the reflectance spectrum

Valery V. Filippov; Vitaly P. Kutavichus

doi:10.1117/12.435955

10 August 2001 Optical constants and film thickness calculation based on the ratio of envelopes of the reflectance spectrum

Valery V. Filippov, Vitaly P. Kutavichus

Author Affiliations +

Proceedings Volume 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light; (2001) https://doi.org/10.1117/12.435955
Event: Lightmetry, 2000, Pultusk, Poland

Abstract

A spectrophotometric method is presented, in which the ratio of envelopes of minima and maxima of reflection spectra is used to determine optical constants of a film on substrate. The ratio used allows avoiding absolute reflectivity measurements. Thus, there is no need for the procedure of a spectrophotometer calibration. An application of the ratio measurements for an analysis of isotropic absorbing homogeneous films is described. Provided the film is transparent, the approach offers the simple analytical solution of an inverse problem. A simple iterative procedure is described to find the thickness and optical constants of absorbing films from measurements for s and p polarizations at single angle of incidence.

Citation Download Citation

Valery V. Filippov and Vitaly P. Kutavichus "Optical constants and film thickness calculation based on the ratio of envelopes of the reflectance spectrum", Proc. SPIE 4517, Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light, (10 August 2001); https://doi.org/10.1117/12.435955

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