MEMS/MEOMS devices are ubiquitous and span a diverse set of markets and technology circles Typically these devices are inserted into the final product with only a minimal amount of precision inspection. It is imperative that micro inspection and other micro packaging technique ware implemented at the front end of the manufacturing process to avoid costly yield problems. Metrology and Machine Vision can increase yields throughputs, and reduce downtime by minimizing reliance on human vision and manual dexterity. In this work we begin to define a systems view of the different types of MEMS/MEOMS devices and associated micro packaging and inspection techniques and issues. We then conclude with cognitive machine vision and experiment.
Rick Conner, Rick Conner,
"MEMS/MEOMS: cognitive machine vision in a MOEMS world", Proc. SPIE 4532, Active and Passive Optical Components for WDM Communication, (30 July 2001); doi: 10.1117/12.436046; https://doi.org/10.1117/12.436046