Parameter calibration in topography measurement

Yun Han; Li Ma; Shi Ping He

doi:10.1117/12.468848

29 May 2002 Parameter calibration in topography measurement

Yun Han, Li Ma, Shi Ping He

Proceedings Volume 4537, Third International Conference on Experimental Mechanics; (2002) https://doi.org/10.1117/12.468848
Event: Third International Conference on Experimental Mechanics, 2002, Beijing, China

Abstract

In measurement of 3D object shapes using projected grating method in situ, the calibration of parameters is one of the most important factors that affect the measurement accuracy. In this paper, a study is conducted on the technique of calibrating parameters in 3D topography measurement and the Fourier phase demodulation technique is used to process the experimental data. Eth calibrations of the coordinate system and geometry parameters are provided. Some experimental results are given and the measurement sensitivity and accuracy are discussed.

Citation Download Citation

Yun Han, Li Ma, and Shi Ping He "Parameter calibration in topography measurement", Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); https://doi.org/10.1117/12.468848

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