28 September 2001 Anodic alumina as a basis for various-purpose micro-electro-mechanical devices
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Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442981
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
Applications prospects for micro-electro-mechanical devices and examples of their design as electrostatic micro-relays, dilatometric sensors, and arrow indicator heads are presented in the paper. Fabrication of these devices is based on unique possibilities of alumina technology to form various design elements in a single monolithic part, as well as on high physical and mechanical parameters of anodic alumina.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Georgy I. Efremov, Georgy I. Efremov, Nikolay Ivanovich Mukhurov, Nikolay Ivanovich Mukhurov, } "Anodic alumina as a basis for various-purpose micro-electro-mechanical devices", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442981; https://doi.org/10.1117/12.442981
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