Excimer laser surface micromachining of LiNbO3 for realization of optimized optical modulator electrode structures

Han-Woo Chong; Arnan Mitchell; Jason P. Hayes; Michael W. Austin

doi:10.1117/12.442934

28 September 2001 Excimer laser surface micromachining of LiNbO₃ for realization of optimized optical modulator electrode structures

Han-Woo Chong, Arnan Mitchell, Jason P. Hayes, Michael W. Austin

Author Affiliations +

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442934
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

An investigation of the micromachining of trenches in lithium niobate (LiNbO₃) using direct imaged 248 nm KrF (krypton fluoride) excimer laser photoablation is presented. High resolution trenches, 2-20 micrometers wide and 0.5-7.5 micrometers depth have been produced. These trenches are assessed and are deemed suitable for the machining of integrated optic structures with particular application in the enhancement of electrodes for broadband optical intensity modulators.

Citation Download Citation

Han-Woo Chong, Arnan Mitchell, Jason P. Hayes, and Michael W. Austin "Excimer laser surface micromachining of LiNbO₃ for realization of optimized optical modulator electrode structures", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442934

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