28 September 2001 Laser microchemical etching of waveguides and quasi-optical components
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Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442932
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
Laser induced micro chemical etching of silicon can be used to quickly and cheaply machine high-quality three-dimensional structures that would otherwise be nearly impossible to fabricate, in particular THz waveguide structures and quasi-optical components. At the University of Arizona, the construction and characterization of the first laser micro-machining system designed for waveguide components fabrication has been completed. Our system can be used to fabricate focal plane heterodyne mixer arrays, coherent beam combiners, AR grooved silicon lenses, phase gratings, single mode filters and more. Laser micro machining enables the fabrication of three-dimensional structures down to a few microns accuracy and up to 6 inches across in a short time. This presentation discusses the design and performance of our micro-machining system, and illustrates the type, range and performance of quasi- optical components this exciting new technology will make accessible.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Y. Drouet d'Aubigny, Christian Y. Drouet d'Aubigny, Christopher K. Walker, Christopher K. Walker, Bryan D. Jones, Bryan D. Jones, } "Laser microchemical etching of waveguides and quasi-optical components", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442932; https://doi.org/10.1117/12.442932
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