MEMS/MOEMS application to optical communication

Hiroyuki Fujita

doi:10.1117/12.442944

28 September 2001 MEMS/MOEMS application to optical communication

Hiroyuki Fujita

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442944
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The paper describes brief summary of current MEMS technology and its application to optics. The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays, data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.

Citation Download Citation

Hiroyuki Fujita "MEMS/MOEMS application to optical communication", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442944

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