28 September 2001 Method to achieve large displacements using comb drive actuators
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Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442975
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
The electromechanical side-instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing, the initial finger overlap, and the spring stiffness ratio of the compliant suspension. Proper design of the suspension structure is the most effective way to stabilize the actuator and therefore to achieve a large deflection. In this paper, an improved suspension design, so called tilted folded-beam suspension, is proposed. The expressions for the spring constants of the proposed suspension both in and perpendicular to the stroke direction are given. Using such suspension, the stability of the comb-drive actuator is improved and the stable travel range is enhanced. Comb drive actuators with various tilted folded-beam suspensions were fabricated using the standard surface micromachining technology and their operational performances were characterized. The experimental results are in good agreement with the theoretical predictions.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guangya Zhou, Guangya Zhou, Duongsin Low, Duongsin Low, Philip Dowd, Philip Dowd, } "Method to achieve large displacements using comb drive actuators", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442975; https://doi.org/10.1117/12.442975
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