2 October 2001 Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
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Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443009
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
We describe the design, fabrication, test and preliminary analysis of a polycrystalline silicon MEMS inchworm actuator fabricated in a five level surface micromachining process. Large force generation (500 micronewtons), large range of motion (+/- 100 microns), small area requirements (600 X 200 um), small step size (10, 40 or 120 nanometers), and a large velocity range (0 to 90 microns per second) are demonstrated. We characterize force with a load cell whose range is calibrated on a logarithmic scale from micronewtons to millinewtons. We characterize out-of-plane displacement with interferometry, and in-plane displacement with Moire metrology sensitive to approximately 60 nm. The actuator serves well for testing friction under conditions of well- known applied pressure. We found that our surfaces exhibited a static coefficient of friction (cof) of approximately 0.3, and a dynamic cof of approximately 0.2. We also present initial wear studies for this device.
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Maarten P. de Boer, Maarten P. de Boer, David L. Luck, David L. Luck, Jeremy A. Walraven, Jeremy A. Walraven, James M. Redmond, James M. Redmond, } "Characterization of an inchworm actuator fabricated by polysilicon surface micromachining", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443009; https://doi.org/10.1117/12.443009
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