2 October 2001 Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
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Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443009
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
We describe the design, fabrication, test and preliminary analysis of a polycrystalline silicon MEMS inchworm actuator fabricated in a five level surface micromachining process. Large force generation (500 micronewtons), large range of motion (+/- 100 microns), small area requirements (600 X 200 um), small step size (10, 40 or 120 nanometers), and a large velocity range (0 to 90 microns per second) are demonstrated. We characterize force with a load cell whose range is calibrated on a logarithmic scale from micronewtons to millinewtons. We characterize out-of-plane displacement with interferometry, and in-plane displacement with Moire metrology sensitive to approximately 60 nm. The actuator serves well for testing friction under conditions of well- known applied pressure. We found that our surfaces exhibited a static coefficient of friction (cof) of approximately 0.3, and a dynamic cof of approximately 0.2. We also present initial wear studies for this device.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Maarten P. de Boer, Maarten P. de Boer, David L. Luck, David L. Luck, Jeremy A. Walraven, Jeremy A. Walraven, James M. Redmond, James M. Redmond, } "Characterization of an inchworm actuator fabricated by polysilicon surface micromachining", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443009; https://doi.org/10.1117/12.443009


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