Design and fabrication of MEMS-based micropropulsion devices at JPL

Juergen Mueller; Eui-Hyeok Yang; Amanda A. Green; Victor White; Indrani Chakraborty; Robert H. Reinicke

doi:10.1117/12.443018

2 October 2001 Design and fabrication of MEMS-based micropropulsion devices at JPL

Juergen Mueller, Eui-Hyeok Yang, Amanda A. Green, Victor White, Indrani Chakraborty, Robert H. Reinicke

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443018
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The development and fabrication of microfabricated propulsion components at the Jet Propulsion Laboratory is reviewed. These include a vaporizing liquid micro-thruster, which vaporizes propellant to produce thrust. Thrust performances of 32 (mu) N for an input power of 0.8 W were measured. Miniature solenoid and latch valves are being developed by Moog, Inc. in collaboration with JPL.

Citation Download Citation

Juergen Mueller, Eui-Hyeok Yang, Amanda A. Green, Victor White, Indrani Chakraborty, and Robert H. Reinicke "Design and fabrication of MEMS-based micropropulsion devices at JPL", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443018

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