Design for reliability of MEMS/MOEMS for lightwave telecommunications

Susanne Arney; Vladimir A. Aksyuk; David J. Bishop; Cristian A. Bolle; Robert E. Frahm; Arman Gasparyan; C. Randy Giles; Suresh Goyal; Flavio Pardo; Herbert R. Shea; Michael T. Lin; Carolyn D. White

doi:10.1117/12.442996

2 October 2001 Design for reliability of MEMS/MOEMS for lightwave telecommunications

Susanne Arney, Vladimir A. Aksyuk, David J. Bishop, Cristian A. Bolle, Robert E. Frahm, Arman Gasparyan, C. Randy Giles, Suresh Goyal, Flavio Pardo, Herbert R. Shea, Michael T. Lin, Carolyn D. White

Author Affiliations +

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.442996
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Optical Micro-Electro-Mechanical Systems (Optical MEMS, or MOEMS) comprise a disruptive technology whose application to telecommunications networks is transforming the horizon for lightwave systems. The influences of materials systems, processing subtleties, and reliability requirements on design flexibility, functionality and commercialization of MOEMS are complex. A tight inter-dependent feedback loop between Component/ Subsystem/ System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating their development into commercial offerings.

Citation Download Citation

Susanne Arney, Vladimir A. Aksyuk, David J. Bishop, Cristian A. Bolle, Robert E. Frahm, Arman Gasparyan, C. Randy Giles, Suresh Goyal, Flavio Pardo, Herbert R. Shea, Michael T. Lin, and Carolyn D. White "Design for reliability of MEMS/MOEMS for lightwave telecommunications", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.442996

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