2 October 2001 Design for reliability of MEMS/MOEMS for lightwave telecommunications
Author Affiliations +
Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.442996
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Optical Micro-Electro-Mechanical Systems (Optical MEMS, or MOEMS) comprise a disruptive technology whose application to telecommunications networks is transforming the horizon for lightwave systems. The influences of materials systems, processing subtleties, and reliability requirements on design flexibility, functionality and commercialization of MOEMS are complex. A tight inter-dependent feedback loop between Component/ Subsystem/ System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating their development into commercial offerings.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Susanne Arney, Susanne Arney, Vladimir A. Aksyuk, Vladimir A. Aksyuk, David J. Bishop, David J. Bishop, Cristian A. Bolle, Cristian A. Bolle, Robert E. Frahm, Robert E. Frahm, Arman Gasparyan, Arman Gasparyan, C. Randy Giles, C. Randy Giles, Suresh Goyal, Suresh Goyal, Flavio Pardo, Flavio Pardo, Herbert R. Shea, Herbert R. Shea, Michael T. Lin, Michael T. Lin, Carolyn D. White, Carolyn D. White, } "Design for reliability of MEMS/MOEMS for lightwave telecommunications", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.442996; https://doi.org/10.1117/12.442996

Back to Top