Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers

Christian Rembe; Pamela Caton; Richard M. White; Richard S. Muller

doi:10.1117/12.442992

2 October 2001 Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers

Christian Rembe, Pamela Caton, Richard M. White, Richard S. Muller

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.442992
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

We describe an improved stroboscopic interferometer system making possible static-deformation measurements of MEMS structures as well as motion measurements at frequencies up to 1MHz. The time resolution of the system is determined by the width of the strobed laser pulse. To demonstrate high-frequency measurement capabilities, we investigate acoustic waves on a flexural plate-wave micropump developed at the Berkeley Sensor & Actuator Center. We also characterize the micropump with a commercial micro scanning vibrometer (Polytec). The results are compared and different features of the two systems are discussed.

Citation Download Citation

Christian Rembe, Pamela Caton, Richard M. White, and Richard S. Muller "Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.442992

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