1 October 2001 GaAs-membrane-supported millimeter-wave filters
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This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrate. For the first time, a 2.2 micrometers thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semiinsulating <100> GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequency of 38 respectively 77 GHz were designed and manufactured on GaAs micromachined substrate. `On wafer' measurements for the filter structures were performed. Losses less than 1.5 dB at 38 GHz and less than 2 dB at 77 GHz have been obtained for both the silicon as well as for the GaAs based micromachined filters.
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George Konstantinidis, Alexandru Mueller, George Deligiorgis, Ioana Petrini, Dan Vasilache, Dan Neculoiu, Michalis Lagadas, Cristina Buiculescu, Viorel Avramescu, Sergiu A. Iordanescu, Pierre Blondy, "GaAs-membrane-supported millimeter-wave filters", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443031; https://doi.org/10.1117/12.443031

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