1 October 2001 GaAs-membrane-supported millimeter-wave filters
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Abstract
This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrate. For the first time, a 2.2 micrometers thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semiinsulating <100> GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequency of 38 respectively 77 GHz were designed and manufactured on GaAs micromachined substrate. `On wafer' measurements for the filter structures were performed. Losses less than 1.5 dB at 38 GHz and less than 2 dB at 77 GHz have been obtained for both the silicon as well as for the GaAs based micromachined filters.
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George Konstantinidis, George Konstantinidis, Alexandru Mueller, Alexandru Mueller, George Deligiorgis, George Deligiorgis, Ioana Petrini, Ioana Petrini, Dan Vasilache, Dan Vasilache, Dan Neculoiu, Dan Neculoiu, Michalis Lagadas, Michalis Lagadas, Cristina Buiculescu, Cristina Buiculescu, Viorel Avramescu, Viorel Avramescu, Sergiu A. Iordanescu, Sergiu A. Iordanescu, Pierre Blondy, Pierre Blondy, } "GaAs-membrane-supported millimeter-wave filters", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443031; https://doi.org/10.1117/12.443031
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