1 October 2001 Laser micromachining for manufacturing MEMS devices
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Abstract
Applications of laser micromachining to the manufacture and prototyping of MEMS and MOEMS devices are presented. Examples of microturbines, biofactory on a chip, microfluidic components and microoptical elements manufactured by laser micromachining are described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malcolm C. Gower, Malcolm C. Gower, } "Laser micromachining for manufacturing MEMS devices", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443040; https://doi.org/10.1117/12.443040
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